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实验检测分析仪器 > Newport & OAI 光功率计
 
Model 659 meter
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Model 659 meter

 For over 45 years, OAI is a world leader in UV Liight & Energy Measurement Instrumentation used for reliable accurate calibrated control of the
photolithography processes in the Semiconductor, MEMS, Wafer Packaging and Wafer Bumping Industries. The New Model 659 is an advanced UV exposure analyzer specifically designed for use with all wafer steppers including high intensity wafer steppers. This meter averages up to 400 exposure readings , has Ethernet and USB interface for downloading recorded measurements, and has intensity range of up to 7,500mW/cm2. Probes are available in wavelength of 365nm, 400nm, 420nm & 436nm.. OAI has a complete certified calibration lab to maintain the performance, quality and reliability of our meters. The Model 659 meter is traceable to NIST standards.

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UV LIGHT & ENERGY METER
For use with all Wafer Steppers
 
Model 659
For over 45 years, OAI is a world leader in UV Liight & Energy Measurement Instrumentation used for reliable accurate calibrated control of the
photolithography processes in the Semiconductor, MEMS, Wafer Packaging and Wafer Bumping Industries. The New Model 659 is an advanced UV exposure analyzer specifically designed for use with all wafer steppers including high intensity wafer steppers. This meter averages up to 400 exposure readings , has Ethernet and USB interface for downloading recorded measurements, and has intensity range of up to 7,500mW/cm2. Probes are available in wavelength of 365nm, 400nm, 420nm & 436nm.. OAI has a complete certified calibration lab to maintain the performance, quality and reliability of our meters. The Model 659 meter is traceable to NIST standards.
 
METER SPECIFICATIONS
USER INTERFACE:                        Touch Screen
COMPUTER INTERFACE:              Optional ethernet & USB for downloading recorded measurements
POWER:                                       Battery Operated with rechargeable 3.7V Lithium Ion with charge protection
CHARGER POWER:                     100-240 VAC
DISPLAY SETUP:                          2 Screens
  1. Set up Screen - ethernet address, date, and time
  2. Run Screen – wavelength, intensity, time, dose, probetemperature, probe type, percent of deviation, serial number, calibration due date, battery status, probe serial number, and charger status.
MEMORY STORAGE:            Up to 400 reading
INTENSITY RANGE:             Up to 7,500mW/cm2
INTENSITY RESOLUTION:   0.01mW/cm2
DOSE RANGE:                     Up to 1000 J/cm3
DOSE RESOLUTION:            0.01mJ/cm3
TIME RANGE:                     Up to 9999 seconds
TIME RESOLUTION:            0.0001 seconds
MINIUM DOSE EXPOSURE 25 m seconds
DIMENSIONS:                    14” X 8.25” X 3.5”
WEIGHT:                             3.5 lbs
OPERATING ENVIROMENT:  15 – 40 degre
COMPLIANCE:ROHS2 & CE (EMC & safety)
 
PROBE SPECIFICATIONS
Options:                               Non compensated temperature probe
PROBE DECTOR:                   Silicon photodiode
AVAILABLE WAVE LENGTHS ( nm) 365, 400, 420, 436
FILTERS:                                 Multilayer absorption/dielectric
INTENSITY RANGE:               Up to 7,500mW/cm2
INTERCHANGEABILITY:         Any Model 659 probe can be used with any of the 659 meters
COMPLIANCE:                       ROHS2 & CE ( EMC & safety)
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